CAS No. 75-59-2/10424-65-4 Tetramethyl ammonium hydroxide aqueous TMAH-238
Typical Properties CAS No. 75-59-2/10424-65-4 Chemical formula (CH3)4NOH·5H2O Appearance Colorless transparent liquid Specific Gravity @ 20℃ 1.021 Item Unit Min Max Assay % 2.378 2.382 Color Hazen 5 CO32- (Carbonate) ppm 80 Cl- ( Chloride ) ppm 0.1 CH3OH (Methanol) ppm 40 Li (Lithium) ppb 5 Na (Sodium) ppb 10 Mg (Magnesium) ppb 5 Al (Aluminum) ppb 10 K (Potassium) ppb 10 Ca (Calcium) ppb 10 Cr (Chromium) ppb 5 Mn (Manganese) ppb 5 Fe (Iron) ppb 5 Ni (Nickel) ppb 5 Co (Cobalt) ppb 5 Cu (Copper) ppb 5 Zn (Zinc) ppb 5 Mo (Molybdenum) ppb 5 Cd (Cadmium) ppb 5 Pb (Lead) ppb 5 Ag (Silver) ppb 5 Particle >0.5um Ea/ml 100 Application -Brightener cleaner and touch cutting agent for computer silicon wafer surface during the production of silicon wafer. -Widely used in electronic industry, especially as positive resister developer, silicon wafer wet etchant and super clean solution for CMP process. Also used in the manufacture of integrated circuits, liquid crystal displays, printed circuit boards, capacitors, sensors, and many other electronic components. Storage and handling -Available in 25 kg/barrel -Store products in tightly closed original containers at 5-40℃ -Shelf life: 12 months from delivery date -According to non-dangerous goods transport
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